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Condensed Matter > Materials Science

arXiv:1207.0619 (cond-mat)
[Submitted on 3 Jul 2012]

Title:Dual functions of anti-reflectance and surface passivation of the atomic layer deposited Al2O3 films on crystalline silicon substrates

Authors:Li Qiang Zhu, Xiang Li, Zhong Hui Yan, Hong Liang Zhang, Qing Wan
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Abstract:Surface anti-reflectance and passivation properties of the Al2O3 films deposited on crystalline Si substrates by atomic layer deposition are investigated. Textured Si with 100 nm Al2O3 shows a very low average reflectance of ~2.8 %. Both p-type and n-type Si wafers are well passivated by Al2O3 films. The maximal minority carrier lifetimes are improved from ~10 {\mu}s before Al2O3 passivation to above 3 ms for both p-type and n-type Si after Al2O3 passivation layer deposition and annealing at an appropriate temperature. Our results indicate the dual functions of anti-reflectance and surface passivation in c-Si solar cell applications.
Subjects: Materials Science (cond-mat.mtrl-sci)
Cite as: arXiv:1207.0619 [cond-mat.mtrl-sci]
  (or arXiv:1207.0619v1 [cond-mat.mtrl-sci] for this version)
  https://doi.org/10.48550/arXiv.1207.0619
Related DOI: https://doi.org/10.1109/LED.2012.2219491

Submission history

From: Qing Wan [view email]
[v1] Tue, 3 Jul 2012 09:38:55 UTC (320 KB)
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