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Condensed Matter > Superconductivity

arXiv:1009.0167v1 (cond-mat)
[Submitted on 1 Sep 2010 (this version), latest version 4 Nov 2010 (v3)]

Title:High-Quality Submicron Nb/Al-AlOx/Nb Josephson Junctions for Quantum Devices

Authors:Christoph Kaiser, J. M. Meckbach, K. Ilin, J. Lisenfeld, R. Schäfer, A. V. Ustinov, M. Siegel
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Abstract:We have developed a combined photolithography / electron-beam lithography fabrication process for sub-{\mu}m to {\mu}m-size Nb/Al-AlOx/Nb Josephson junctions of high quality. In order to define the junction size precisely and protect its top electrode during anodic oxidation, the novel concept of an aluminum hard mask has been developed and used. Josephson junctions of sizes down to 0.5 {\mu}m^2 have been fabricated and thoroughly characterized. We find that they have a very high quality, which is shown by the IV curves with quality parameters Vm > 50 mV at 4.2 K, as well as Ic*RN products of 1.75-1.93 mV attained at lower temperatures. In order to test the usability of our fabrication process for quantum devices, we have also designed, fabricated and experimentally investigated superconducting phase qubits. We found relaxation times T1 = 26 ns and dephasing times T2 = 21 ns, which is longer than for similar Nb/AlOx/Nb qubit structures fabricated by other groups. By investigating the subgap leakage of some Josephson junctions in detail, we found that our coherence times are not limited by quasiparticle leakage.
Subjects: Superconductivity (cond-mat.supr-con)
Cite as: arXiv:1009.0167 [cond-mat.supr-con]
  (or arXiv:1009.0167v1 [cond-mat.supr-con] for this version)
  https://doi.org/10.48550/arXiv.1009.0167

Submission history

From: Christoph Kaiser [view email]
[v1] Wed, 1 Sep 2010 12:06:24 UTC (614 KB)
[v2] Fri, 3 Sep 2010 13:04:47 UTC (614 KB)
[v3] Thu, 4 Nov 2010 08:50:37 UTC (1,100 KB)
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